A Thermally Actuated Microelectromechanical (MEMS) Device For Measuring Viscosity

Thermally Actuated Low Impedance MEMS Resonators for Mass Sensing Applications

This paper presents high-Q thermally actuated micromechanical resonators suitable for sensory applications under atmospheric pressure. Single crystal silicon resonators with resonance frequencies in the 250 KHz to 1.5MHz range were fabricated using a single-mask fabrication process on SOI substrates. The resonators were operated in a one-port configuration in their in-plane resonance mode with ...

Design and performance analysis of thermally actuated MEMS circuit breakers

The use of MEMS electrical switches as miniature electrically resettable circuit breakers is described. A prototype based on nickel thermal actuators on silicon has been fabricated and tested, and thermo-mechanical analysis is presented showing the relation between design parameters and performance. Temperature dependence of trip current is shown to be below 0.2% K−1, and analysis is presented ...

Modeling and Analysis of an Optically-Actuated, Bistable MEMS Device

Reliability of Microelectromechanical Systems (MEMS)

Reliability is a key parameter for the eventual prevalence of microelectromechanical systems (MEMS) as either sub-components or as standalone products. Traditionally, micromachined components have been made by separating the micromachined chip design and fabrication processes from the packaging and reliability issues. This “evolutionary” partitioning of microsystems has led to long incubation t...

Design and fabrication of MEMS-based thermally-actuated image stabilizer for cell phone camera

A micro–electro-mechanical system (MEMS)-based image stabilizer is proposed to counteracting shaking in cell phone cameras. The proposed stabilizer (dimensions, 8.8 8.8 0.2 mm) includes a two-axis decoupling XY stage and has sufficient strength to suspend an image sensor (IS) used for anti-shaking function. The XY stage is designed to send electrical signals from the suspended IS by using eight...